Oklahoma State University - Tulsa
Oklahoma State University - Tulsa

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Helmerich Research Center Clean Room

Clean Room

The clean room at OSU-Tulsa's Helmerich Research Center is Class 100, and is 1500 square feet.

Equipment

  • ICP (Inductively Coupled Plasma) Etcher
    Oerlikon w/ 4" wafer load-lock - Gas: CF4, CHF3, Ar, O2, SF6, H2, Cl2, N2
  • PECVD (Plasma Enhanced Chemical Vapor Deposition)
    Oerlikon 790+ - Gas: SiH4, NH3, SF6, O2, N2, N2O, He
  • Furnace 1 - Expertech CTR 125
    Standard Tube Furnace w/Bubbler: RT..1100degC
  • Furnace 2 - Expertech CTR 125
    LPCVD (Low Pressure Chemical Vapor Deposition) w/SiH4 & H2: RT..670C
  • E-Beam Evaporator - Not Yet Operational
  • Sputtering System - AJA Orion
    • 6 - 2" magnetron guns w/ 4" wafer load-lock
    • DC Source DCX5750 - 750W
    • DC Pulse - Pinnacle Plue - 1000W
    • AC Source - AJA 100/300 RF - 300W
    • Bias Source (AC) - AJA 100/300 RF - 50w
  • Spinner
    Karl Suss Microtec CT 62
  • NanoSpec
    Nano Metrics NA 109
  • Mask Aligner
    Karl Suss MA6 w/back side alignment
  • Profilometer
    Alpha-Step 500 Surface Profiler
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