Oklahoma State University - Tulsa
Oklahoma State University - Tulsa

Veeco FPP5000 four-point probe
Alpha Step 500 Surface Profiler

The four point probe passes a small current though a sample to determine the material’s sheet resistivity, slice resistivity, V/I, and metallization thickness. Extended measurement range displays sheet resistivity up to 450k ohm/sq and down to a resolution of .001 milliohm/sq.

The Alphastep 500 is a stylus-based surface profiler to measure step heights of surfaces. A stylus is placed in contact with, and then gently dragged along the surface of the substrate. The vertical deflection measures the change in step height.

  • Step heights from 500 Angstroms to 300 µm
  • Scan length from 100 Angstroms up to 0.3 mm
  • Ranges and resolutions:
    • 13 µm at 1 A
    • 300 µm at 25 A
  • Max sample dimensions:
    • 150 mm (6 inch) wide
    • 15 mm (.59 inch) thick

Veeco FPP5000 four-point probe and Alpha Step 500 Surface Profiler