Oklahoma State University - Tulsa
Oklahoma State University - Tulsa

NanoSpec Nano Metrics NA 109 Reflectometer

The reflectometer is used to measure the thickness of transparent films such as photoresist and silicon dioxide based on the absorption of light at different wavelengths. Recipes are setup for silicon dioxide, photoresist, aluminum nitride, and parylene and are developed using the materials’ Cauchy coefficients.

NanoSpec Nano Metrics NA 109 Reflectometer